The CMUT arrays are built on a silicon-on-insulator SOI wafer, and all electrical connections to the array elements are brought to the back side of the wafer through the highly conductive silicon substrate. Lowest order Lamb waves in the silicon substrate are also found to contribute to the cross talk between elements. An equivalent circuit of the transducer is also obtained from these solutions. We fabricated an annular element capacitive micromachined ultrasonic transducer CMUT array featuring a MHz operating frequency and a 1. An equivalent circuit model for the transducer is proposed that produces results, which match well with those observed by experiment.
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